NMLS 2027 · Stuttgart, Germany

Nano-Micro-Lithography Symposium 2027

February 17–18, 2027 · Hosted by IMS CHIPS

Join us in Stuttgart for the Nano-Micro-Lithography Symposium, jointly organized by Heidelberg Instruments, Nanoscribe, micro resist technology, GenISys, and Notion Systems.

Coffee breaks and lunch will be provided to support scientific discussion and networking. Participation is free of charge.

Register below

 

The Nano-Micro-Lithography Symposium 2027 (NMLS 2027) is a free 1.5-day in-person event hosted at IMS CHIPS – Institut für Mikroelektronik in Stuttgart, Germany, one of Europe’s leading research institutes for microelectronics and nanotechnology. Combining cutting-edge research with industrial application, IMS CHIPS plays an important role in technology transfer and supports the development of manufacturing-ready solutions.

Bringing together experts and users from Nanoscribe, Heidelberg Instruments, GenISys, micro resist technology, and Notion Systems, NMLS 2027 provides a platform for researchers, engineers, cleanroom managers, process developers, and industry professionals to exchange knowledge and discuss the latest advances in micro- and nanofabrication. Expert presentations, user case studies, and technology updates will explore lithography and direct-write technologies for applications in photonics, micro-optics, semiconductors, advanced packaging, MEMS, sensors, and emerging quantum technologies. Topics will include 2D, 2.5D, and 3D fabrication strategies, advanced materials, simulation and process optimization, and technologies such as two-photon lithography, thermal scanning probe lithography, and industrial inkjet printing.

With a focus on practical implementation and industrial workflows, the symposium will highlight approaches to accelerating product development, rapid prototyping, and process optimization – from R&D and small-series production to industrial manufacturing. Participants can also benefit from networking opportunities and a guided cleanroom tour of the host facility.

Participation is free of charge, but registration is required. Places are limited and will be allocated on a first-come, first-served basis.

 

Preliminary Agenda

The missing talks and speakers will be added soon.

February 17, 2027

Day one · IMS CHIPS, Stuttgart

Photonics manufacturing, integration and innovative production technologies.

Time Topic Speaker
12:30 Registration of Participants  
13:30 Welcome & Introduction IMS Chips: Challenges & Opportunities in Photonics Manufacturing Prof. Dr. Niels Quack
IMS CHIPS
14:05 Keynote 1: Photonics & Co-Packaged Optics – Industrial Adoption and Market Trends Holger Sailer
IMS CHIPS
14:35 From Alignment to Integration: Adaptive Workflows for 3D Microfabrication Jochen Zimmer
Nanoscribe
14:55 Industrial Case Study / Customer Success Story TBD
Nanoscribe
15:15 Coffee Break & Guided Cleanroom Window Tour (Parallel Tours)  
16:45 Photonics Packaging (TBD) Mathias Kaschel
IMS CHIPS
17:15 Innovative Hybrid Polymers Enabling Advanced Manufacturing of Photonic and Micro-Optical Applications Dr. Maria Russew
micro resist technology (TBC)
17:35 Beyond Lithography: Inkjet Printing for Semiconductor Processes David Hahn
Notion Systems
18:00 End of Official Program Day 1 & Transfer to Hotel TBD
18:30 Dinner & Networking Opportunities at IMS CHIPS (or Hotel Relaxa, TBC)  

February 18, 2027

Day two · IMS CHIPS, Stuttgart

Semiconductors, advanced packaging, and SEM metrology.

Time Topic Speaker
09:00 Welcome & Introduction to Day 2 TBD
09:05 Keynote 2: Semiconductor & Advanced Packaging Industry TBD
09:35 Advanced Packaging Process Integration Markus Wöhrmann
Fraunhofer IZM
10:00 User Talk, Title to follow Alessandro Mustaccio
Axetris
10:20 Coffee Break  
11:10 Advanced SEM Metrology with Versatility for Prototyping and Special Production – Introduction of ProSEM and InSPEC Ruchi Goswami
GenISys
11:30 User Talk XRnanotech or MPI
11:50 TBD  
12:15 TBD  
12:35 Discussion, Networking & Lunch  
14:00 End of Day 2  

Practical information

When and where does NMLS 2027 take place?

The Nano-Micro-Lithography Symposium takes place on February 17 and 18, 2027, at IMS Chips in Stuttgart, Germany. IMS Chips hosts both days of the event. Detailed session times will be announced with the agenda; the two event dates are confirmed.

When can I see the agenda?

The detailed agenda will be added here in the next few weeks. You will receive a confirmation email with the link to this event page after registration, so you can come back for further information anytime. You will also receive a reminder well in advance of the event.

How can I get to the location?

The exact address is

Institute for Microelectronics, Allmandring 30A, 70569 Stuttgart-Vaihingen

Click here to open it in Google Maps.

We recommend using public transport as parking spaces are limited.

Registration

Join us at IMS CHIPS in Stuttgart on February 17–18, 2027.
Allmandring 30a, 70569 Stuttgart

Heidelberg Instruments

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